• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
  • 引用文献
  • 法律状态
  • 优先权
    • 专利摘要:
    In a scribing apparatus for forming a scribe line on the surface of a workpiece by using vibration, it is possible to form a good scribe line without performing unnecessary scribing. The scribe body A has the cutter 14 (contact member) and the vibration generating member 16 which gives a vibration to this cutter 14. As shown in FIG. The cutter 14 is brought into contact with the scribe starting point away from the edge of the surface of the workpiece 100 by the weight of the scribe body A, and in this state, the scribe body ( Impact is given to A), and a starting point crack is formed in this scribe starting point. Thereafter, the cutter 14 is moved along a predetermined trajectory (for example, a closed curve such as a circle) on the surface of the workpiece, and the vibration of the vibration generating member 16 is applied to the cutter 14, thereby scribing. Form a line.
    公开号:KR20010006817A
    申请号:KR1020000013515
    申请日:2000-03-17
    公开日:2001-01-26
    发明作者:시모또요도메교
    申请人:데라마찌 아끼히로；티에치케이 가부시끼가이샤；테라마치 아키히로；가부시키가이샤 베르덱스；
    IPC主号:
    专利说明:

    Scribe Method and Device {SCRIBING METHOD AND APPARATUS}
    TECHNICAL FIELD This invention relates to the scribe method and apparatus which form a scribe line in the surface of the workpiece | work of brittle material, such as plate glass and a ceramic plate.
    A scribing apparatus for forming a scribe line while applying vibration to a brittle material is disclosed in Japanese Patent Laid-Open No. 9-25134. This scribe device fixes the outer cylinder of an air cylinder to a support part, and connects the inner cylinder of an air cylinder to one end of a vibration generating member. Moreover, the cutter holding part is connected to the other end of the vibration generating member, and the cutter holding part is slidably attached to the supporting part via the slide mechanism. Then, by pressing the cutter holding portion with the force of the air cylinder, the cutter held on the cutter holding portion is pressed against the surface of the work piece, while a high frequency voltage is applied to the vibration generating member, and the cutter is vibrated by the stretching. In this state, the support portion is moved along the surface of the workpiece to form a scribe line on the surface of the workpiece.
    In drawing the scribe line in the device, the scribe starts from the edge of the face of the workpiece. The edge of the surface of the workpiece is locally broken by the vibration of the cutter, and a scribe line is formed on the basis of this locally broken portion. That is, while the cutter moves along the surface of the workpiece, vertical cracks are generated by tapping the surface of the workpiece at a minute interval due to the vibration of the cutter, but vertical cracks can be grown from the local fracture site of the workpiece. will be.
    However, since the scribing method and apparatus starts scribing from the edge of the face of the workpiece even when it is not necessary to start scribing from the edge of the face of the workpiece, for example, when drawing a scribe line forming a closed curve. There was a flaw that required time for scribes.
    Therefore, although it is considered to make the point away from the edge of the surface of this workpiece | work as a scribe start point, in this case, the instrument which promotes the growth of a vertical crack by vibration was not formed, and a deep good scribe line could not be formed. Moreover, in the hard work piece, the scribe | wire scribe | wire cannot be formed at all simply by moving a cutter like a slap by sliding a work piece.
    BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a side view showing the entirety of a scribing apparatus of an embodiment of the present invention;
    Fig. 2 is a plan view showing the entirety of the scribe device.
    Fig. 3 is an enlarged front view of the main portion of the scribe device, showing a state in which the scribe body rises from the workpiece.
    Fig. 4 is an equivalent view of Fig. 3 showing a state in which the scribe body is placed at the scribe starting point of the workpiece.
    Fig. 5 is an enlarged side view of the main portion of the scribe device, showing a state in which the scribe body is placed at the scribe start point of the workpiece.
    Fig. 6 is an enlarged plan view of the main portion of the scribing apparatus, in which the air cylinder for impacting is shown in cross section only with a rod.
    FIG. 7 is a cross sectional view of the scribe body taken along the line VII-VII in FIG. 5; FIG.
    Fig. 8 is a plan view showing a scribe line drawn by the scribe device.
    <Description of the code | symbol about the principal part of drawing>
    A: scribe body
    B: support member
    2: rotating mechanism (moving means)
    4: X-Y stage (positioning means)
    14 cutter (contact member)
    16: vibration generating member
    30: air cylinder (contact separating means)
    40: air cylinder (impact means)
    50: control unit (control means)
    100: work piece
    105: scribe ship
    In order to achieve the above object, in the first aspect of the present invention, a vibration is applied to a work piece by a scribe device having a contact member having a sharp tip, and a scribe body having a vibration generating member for imparting vibration to the contact member. In the scribing method of forming a scribe line, the scribe line is formed by forming a starting crack at a scribing start point away from an edge on the surface of the workpiece, and forming a scribe line on the basis of the starting crack.
    The second aspect is the scribe method of the first aspect, wherein the origin crack is formed by applying an impact to the scribe body.
    The third aspect is the scribe method of the second aspect, wherein the contact member is positioned directly above the scribe starting point by relatively moving along the surface of the workpiece with the scribe body separated upward from the workpiece, and then The lower end of the scribe main body is brought into contact with the scribe starting point with the self weight of the scribe main body, and thereafter, an impact is given to the scribe main body.
    In the fourth aspect, in the scribing method of the first to third aspects, the scribe starting point is substantially coincident with the scribe ending point, so that the scribe line draws a closed curve.
    The fifth aspect is a scribe having a scribe body having a contact member having a sharp tip and a vibration generating member for imparting vibration to the contact member, and a support member movably supporting the scribe body in a direction intersecting the surface of the workpiece. In the apparatus, the scribing main body is provided with impact imparting means for imparting an impact.
    A sixth aspect is the scribe device of the fifth aspect, wherein the impact imparting means includes an air cylinder supported by the support member, and the tip of the rod of the air cylinder contacts the scribe body to impact the contact member. It is characterized by giving.
    In the scribing apparatus of the fifth and sixth aspects, the seventh aspect further includes moving the scribe body and one of the workpieces in a direction along the surface of the workpiece to move the contact member relative to the surface of the workpiece. Positioning means for replacing the contact member with the scribe starting point away from the edge of the face of the workpiece, and by moving the scribe body and one of the workpiece in a direction intersecting the face of the workpiece, the tip of the contact member faces the workpiece. Contact separating means for separating from or contacting the surface of the workpiece, and moving means for relatively moving the contact member along a predetermined trajectory on the surface of the workpiece by moving at least one of the scribe body and the workpiece; With control means,
    The control means controls the contact separating means to control the positioning means with the contact member of the scribe body spaced apart from the surface of the workpiece to replace the contact member with the scribe starting point, and then the contact The separating means is controlled to contact the front end of the contact member with the surface of the workpiece, and then the impact applying means is operated to give an impact to the scribe body, and then the moving means is controlled to operate the contact member. A predetermined trajectory is drawn in terms of convenience, and at least in the process of drawing the predetermined trajectory, the vibration generating member is operated to impart vibration to the contact member.
    EMBODIMENT OF THE INVENTION Hereinafter, the scribe apparatus which comprises 1st embodiment of this invention is demonstrated based on drawing. As shown in Figs. 1 and 2, the scribe device includes a rotating mechanism 2 (rotating means and a moving means) provided in the base frame 1, a table 3 provided in the rotating mechanism 2, The base frame 1 supports the X-Y stage 4 (positioning means) horizontally installed on the rotation mechanism 2 and the X-Y stage 4 so as to be movable vertically via the bracket 5. The scribe main body A is provided.
    The table 3 is for horizontally installing a plate-shaped work piece 100 such as plate glass or ceramic plate. In detail, the two positioning step parts 3a which are linearly extended and orthogonal to each other are formed in the upper surface of the table 3. The workpiece 100 is, for example, formed in a quadrangular shape, and is installed on the upper surface of the table 3 in a state in which the two sides thereof are in contact with the positioning step 3a for positioning. A plurality of suction holes 3b are formed on the upper surface of the table 3, and when the scribe described later is executed, the work piece 100 is driven by driving a vacuum mechanism (not shown) connected to these suction holes 3b. The workpiece 100 is held by suction.
    The table 3 is horizontally rotated by the rotation mechanism 2.
    The X-Y stage 4 is mounted on the base 4a, the first moving base 4b mounted on the base 4a and horizontally movable in the X-axis direction, and on the first moving base 4b. It is equipped with the 2nd moving base 4c which is mounted and can move horizontally to a Y-axis direction. The movable tables 4b and 4c are respectively moved by the known drive mechanisms 4d and 4e.
    As shown in FIGS. 3 to 7, the scribe body A includes a body 10, a holder 12 supported by a small amount of vertical sliding on the body 10, and The vibration generating member 16 which consists of the cutter 14 (head, a contact member) provided in the lower end part of this holder 12, and two piezo actuators etc. which give a vibration to a holder 12 in a perpendicular direction is provided. .
    The body 10 is supported by the bracket 5 via the slide mechanism 6. The slide mechanism 6 includes a base plate 6a fixed vertically to the bracket 5, a guide part 6b fixed to the base plate 6a and extending vertically, and this guide part 6b. The slider 6c is slidably supported in the vertical direction.
    The slider 6c constitutes a part of the scribe body A. As shown in FIG. Moreover, the said bracket 5, the base board 6a, and the guide part 6b comprise the support member B in a claim.
    As best shown in Fig. 5, the slider 6c is attached with four leaf springs 8 (a vibration damping member having elasticity) via the bracket 7, and the leaf springs 8 are attached to the slider 6c. The body 10 is supported.
    The body 10 has a vertically long box shape, and the holder 12 is accommodated therein. The holder 12 also has a vertically long box shape, and the vibration generating member 16 is accommodated therein.
    The vibration generating member 16 is longitudinally formed to be coaxial with the body 10 and the holder 12 (the central axis thereof is indicated by L in the figure), and generates vibration in the axial direction. As shown in Fig. 7, the lower end face of the lower vibration generating member 16 is in contact with the bottom face 12a (contact portion) of the inner space of the holder 12. As shown in Figs.
    As shown in FIG. 7, the upper end of the holder 12 can slide a small amount in the direction (vibration direction) along the center axis L by the guide member 18 provided at the upper end of the body 10. As shown in FIG. Is supported.
    The lower end of the holder 12 is supported by a leaf spring 20 spanning the body 10 and a spherical ball 22 (pressure supply member) made of an elastic material such as rubber or resin. The ball 22 is interposed between the support plate 24 and the holder 12 fixed to the body 10.
    The ball 22 presses the holder 12 upward with its elastic restoring force, and between the bottom surface 12a of the inner space of the holder 12 and the adjusting screw 26 screwed into the guide member 18. Preload (force in the direction of compressing the vibration generating member 16 in the axial direction) is applied to the vibration generating member 16.
    The holder 12 extends downwardly by dividing the plate spring 20 into two branches. The cutter 14 is attached to the lower end part (tip part) of these pair of extension part via the attachment mechanism 28. As shown in FIG. This cutter 14 is arrange | positioned on the center axis line L of the said vibration generating member 16, and the lower end part (tip part) becomes conical and becomes sharp. At the lower end of the cutter 14, diamond particles having a pyramidal shape are fixed. The vertex of this diamond particle faces downward and contacts the surface of the workpiece 100 mentioned later.
    As shown in Figs. 1 and 3, an air cylinder 30 (contact separating means) is vertically attached to the front face of the base plate 6a that is perpendicular to the base plate 6a. The rod 31 of this air cylinder 30 opposes the L-shaped bracket 85 fixed to the side surface of the body 10.
    On the upper end surface of the base plate 6a of the slide mechanism 6 is attached an air cylinder 40 (impacting means), which constitutes the most important feature of the present invention via the bracket 45. The rod 41 of this air cylinder 40 faces downward vertically and opposes the upper end surface of the slider 6c.
    The scribe device also has a control unit 50 (control means, shown only in FIG. 2). The control unit 50 controls the vacuum mechanism, the rotary mechanism 2, the drive mechanisms 4d and 4e of the X-Y stage 4, the vibration generating member 16, the air cylinders 30 and 40, and the like. To control.
    The operation of the scribe device constituting the above configuration will be described. As described above, the workpiece 100 is positioned on the horizontal table 3 and mounted horizontally. In the initial state, the cutter 14 of the scribe body A is separated from the workpiece 100 in the horizontal direction.
    When the start button of the control unit 50 is turned on in this state, the control unit 50 executes the following control. First, the vacuum mechanism is driven to adsorb the work piece 100. At the same time or before and after each other, the air cylinder 30 is driven to extend the rod 31 upward, and the scribe body A is lifted through the bracket 35 (see FIG. 3).
    Next, the drive mechanisms 4d and 4e of the X-Y stage 4 are driven to move the movable bases 4b and 4c, thereby separating the scribe body A upward from the surface of the workpiece 100. In a state, it moves to the position directly opposite the scribe start point X (see FIG. 8). This scribe starting point X is isolate | separated from the edge of the workpiece | work 100, and is also isolate | separated from the rotation center R of the rotation mechanism 2.
    As described above, after the cutter 14 of the scribe body A is positioned directly above the scribe starting point X on the surface of the workpiece 100, the air cylinder 30 is driven to retract the rod 31. The scribe body A is lowered by its own weight and placed at the scribe starting point X on the surface of the workpiece 100.
    Next, the air cylinder 40 is driven to extend the rod 41 downward, and the slider 6c of the scribe body A is knocked (impacted). The impact applied to this slider 6c is transmitted to the body 10 via the leaf spring 8 and also to the cutter 14 via the holder 12 and the attachment mechanism 28. Due to the impact applied to the cutter 14, a vertical crack that becomes a starting point crack (damage) occurs at the scribe starting point X of the workpiece 100.
    Next, by applying the high frequency voltage of the same phase to the two vibration generating members 44 and driving the rotating mechanism 2, the cutter 14 is moved on the surface of the workpiece 100 (predetermined). The scribe line 105 which forms a circular circle (closed curve) shown in FIG. 8, returns to the scribe starting point X, and finishes a scribe.
    In this manner, the scribe line 105 can be drawn in a short time because the scribe start point X is used as the point away from the edge, not from the edge of the workpiece 100. That is, the scribing operation from the edge of the workpiece 100 to the scribe line 105 forming the circle can be omitted.
    Formation of the scribe line 105 will be described in detail. The cutter 14 is always given the pressing force (static pressure) with respect to the surface of the workpiece 100. This pressing force is due to the weight of the scribe body A. The vibration generating member 16 receives the high frequency voltage and expands and contracts periodically in the axial direction, and the vibration of the holder 12 accompanying the periodic stretching is transmitted to the workpiece 100 via the cutter 14. As a result, a scribe line 105 having vertical cracks is formed.
    The vertical crack due to the vibration is difficult to grow without the instrument, but as described above, since the starting crack is formed at the scribe starting point X by the impact, this becomes an opportunity to promote the growth of the vertical crack due to the vibration. A good scribe line 105 can be drawn.
    When formation of the scribe line to the workpiece 100 by the cutter 14 is completed, the application of the high frequency voltage to the vibration generating member 16 is stopped, and the air cylinder 40 is driven to move the body 10 upward. Slide the cutter 14 off the workpiece 100.
    With respect to the air cylinder 40, after the rod 41 is extended to give an impact to the scribe body A, the scribe body A is continuously pressed against the work piece 100 in that state. In the process of scribing, the cutter 14 is pressed by the work piece 100 by the static pressure which consists of the sum of the magnetic weight of the scribe main body A, and the force of the air cylinder 40. FIG. The rod 41 of the air cylinder 40 is retracted upward when the scribe ends.
    The work piece 100 on which the scribe line 105 is formed as described above is removed from the table 3 and broken along the scribe line 105 by a breaking device (not shown). Thereby, a circular product can be obtained.
    In addition, the present invention is not limited to the above embodiment and various aspects are possible. For example, in the above embodiment, the rod of the air cylinder 40 may be retracted upward immediately after the impact is applied. In this case, in the scribing process, the cutter 14 is pressed against the work piece 100 at a static pressure of only the weight of the scribe body A.
    The vibration of the vibration generating member 16 may be performed before the impact is applied to the cutter 14 by the air cylinder 40 or before the cutter 14 is placed on the workpiece 100.
    The air cylinder 40 may give an impact to the body 10 instead of the slider 6c.
    As described above, according to the first aspect of the present invention, since the scribe start point is a point away from the edge, not from the edge of the workpiece, the scribe line can be drawn in a short time without drawing unnecessary scribe lines. Can shorten. In addition, since the starting crack is formed at the start point of the scribe, this becomes an opportunity to promote the growth of the vertical crack due to the vibration, so that a good scribe line can be drawn.
    According to the second and fifth aspects, the origin crack can be easily formed by the impact.
    According to the third and seventh aspects, the contact member can be smoothly positioned at the scribe starting point away from the edge of the workpiece.
    According to the fourth aspect, a scribe line for drawing a closed curve can be formed without performing any unnecessary scribe.
    According to the sixth aspect, the configuration of the impact imparting means can be simplified by using the air cylinder.
    权利要求:
    Claims (7)
    [1" claim-type="Currently amended] In the scribing method of forming a scribe line by applying vibration to a workpiece by a scribing apparatus having a scribe body having a tip contact portion and a scribe body having a vibration generating member for imparting vibration to the contact member.
    A scribing method comprising forming a starting crack at a scribing starting point away from an edge in the face of the workpiece, and forming a scribe line based on the starting crack.
    [2" claim-type="Currently amended] The scribe method according to claim 1, wherein the origin crack is formed by applying an impact to the scribe body.
    [3" claim-type="Currently amended] 3. The contact member according to claim 2, wherein the contact member is positioned directly above the scribe starting point by relatively moving along the surface of the workpiece while the scribe body is separated upward from the workpiece.
    Next, by lowering the scribe body, the tip portion of the contact member is brought into contact with the scribe starting point with the weight of the scribe body,
    And then applying an impact to the scribe body.
    [4" claim-type="Currently amended] 4. The scribe method according to any one of claims 1 to 3, wherein the scribe start point substantially coincides with the scribe end point so that the scribe line draws a closed curve.
    [5" claim-type="Currently amended] A scribe device comprising a scribe body having a sharp contact member with a sharp tip and a vibration generating member for imparting vibration to the contact member, and a support member movably supporting the scribe body in a direction crossing the surface of the workpiece.
    A scribing apparatus, characterized in that an impact imparting means is provided to impart an impact to the scribe body.
    [6" claim-type="Currently amended] 6. The scribing apparatus according to claim 5, wherein the impact imparting means includes an air cylinder supported by the support member, and the tip of the rod of the air cylinder contacts the scribe body to impart an impact to the contact member. Device.
    [7" claim-type="Currently amended] The method according to claim 5 or 6,
    Position of the scribe body and the work piece in a direction along the face of the work piece to move the contact member relative to the face of the work piece, thereby replacing the contact member with a scribe start point away from the edge of the face of the work piece. Means for determining,
    Contact separating means for moving the scribe body and one side of the workpiece in a direction intersecting the surface of the workpiece, thereby separating the tip of the contact member from the surface of the workpiece or making contact with the surface of the workpiece;
    Moving means for relatively moving the contact member along a predetermined trajectory on the surface of the workpiece by moving at least one of the scribe body and the workpiece;
    With control means,
    The control means controls the contact separating means to control the positioning means to replace the contact member with the scribe starting point while the contact member of the scribe body is spaced apart from the surface of the workpiece. The contact separating means is controlled to contact the front end of the contact member with the surface of the work piece, and then the impact applying means is operated to give an impact to the scribe body, and then the moving means is controlled to control the contact member. The scribing apparatus characterized by drawing a predetermined | prescribed trajectory in the surface of a workpiece, and operating a said vibration generating member and giving a vibration to the said contact member in the process of drawing at least this predetermined trajectory.
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    同族专利:
    公开号 | 公开日
    JP4203177B2|2008-12-24|
    EP1036773A2|2000-09-20|
    KR100655359B1|2006-12-08|
    JP2000264656A|2000-09-26|
    DE60012803T2|2005-01-13|
    EP1036773B1|2004-08-11|
    US6460257B1|2002-10-08|
    TW490447B|2002-06-11|
    EP1036773A3|2001-03-28|
    DE60012803D1|2004-09-16|
    引用文献:
    公开号 | 申请日 | 公开日 | 申请人 | 专利标题
    法律状态:
    1999-03-18|Priority to JP07323799A
    1999-03-18|Priority to JP99-73237
    2000-03-17|Application filed by 데라마찌 아끼히로, 티에치케이 가부시끼가이샤, 테라마치 아키히로, 가부시키가이샤 베르덱스
    2001-01-26|Publication of KR20010006817A
    2006-12-08|Application granted
    2006-12-08|Publication of KR100655359B1
    优先权:
    申请号 | 申请日 | 专利标题
    JP07323799A|JP4203177B2|1999-03-18|1999-03-18|Scribing method and apparatus|
    JP99-73237|1999-03-18|
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